Size measurement of particles on wafer and evaluation of method uncertainty

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Home PROGRAMMES Technical Committee Initiatives Size measurement of particles on wafer and evaluation of met...

Size measurement of particles on wafer and evaluation of method uncertainty

Project overseer: Ching-Hsuan Chang

Email: Alice.C.Chang@itri.org.tw

Project timeline: 2025/5/1 - 2026/8/31

Project status: Ongoing

Project description

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Establishment of evaluation method for the acoustic camera

APMP-BIPM Time scale workshop 2024